Spectroscopic Ellipsometer

Building MXC, EPFL, 1015 Lausanne
Spectroscopic Ellipsometer

General Short Description

Non-destructive optical technique, based on measurement of the change of the polarisation state of light after reflection at non normal incidence on the surface to study

Relevant technical details

Incidence Angle range: >12° to 90°

Optical range: 290 to 990 nm


Thin Film Optical Characterization

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